Dataset related to "Atomic Force Microscope with an Adjustable Probe...
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- data.niaid.nih.gov
zipUpdated Nov 14, 2022
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EmailClick to copy linkLink copiedCiteJanik Schaude; Janik Schaude; Tino Hausotte; Tino Hausotte (2022). Dataset related to "Atomic Force Microscope with an Adjustable Probe Direction and Integrated Sensing and Actuation" [Dataset]. http://doi.org/10.5281/zenodo.7318734zipAvailable download formatsUnique identifierhttps://doi.org/10.5281/zenodo.7318734Dataset updatedNov 14, 2022AuthorsJanik Schaude; Janik Schaude; Tino Hausotte; Tino HausotteLicenseAttribution 4.0 (CC BY 4.0)https://creativecommons.org/licenses/by/4.0/
License information was derived automaticallyDescriptionThese original measurement data relate to the publication: J. Schaude, T. Hausotte: Atomic Force Microscope with an Adjustable Probe Direction and Integrated Sensing and Actuation, Nanomanufacturing and Metrology 5, pp. 519-148, https://doi.org/10.1007/s41871-022-00143-9. Please refer to this open access publication for a detailed description of the measurement setup and procedure.
All data are in ASCII-format. Each file contains six columns, where column one to three are the x, y, and z-coordinates of the positioning system, column four is the demodulated signal of the AFM (RAFM) and columns five and six are the raw signals of the z-interferometer (QA and QB).
Content of the folders
10_Calibrations: Repeated calibration of the AFM against the z-interferometer of the NMM-1.
20_Standstill-Measurements: Three standstill measurements for 90 s each.
30_Long-Term-Precision: Standstill measurements for 15 s every 10 min for in sum 18 hours.
40_Scans: Repeated closed-loop scans on a calibration grating.
50_SINCOS: Repeated movement of the stage in z-direction for 2 µm with the cantilever being in free air just before the sample.
Acknowledgement
This project was funded by the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) –TRR 285 -Project-ID 418701707, subproject C05
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Attribution 4.0 (CC BY 4.0)https://creativecommons.org/licenses/by/4.0/
License information was derived automatically
These original measurement data relate to the publication: J. Schaude, T. Hausotte: Atomic Force Microscope with an Adjustable Probe Direction and Integrated Sensing and Actuation, Nanomanufacturing and Metrology 5, pp. 519-148, https://doi.org/10.1007/s41871-022-00143-9. Please refer to this open access publication for a detailed description of the measurement setup and procedure.
All data are in ASCII-format. Each file contains six columns, where column one to three are the x, y, and z-coordinates of the positioning system, column four is the demodulated signal of the AFM (RAFM) and columns five and six are the raw signals of the z-interferometer (QA and QB).
Content of the folders
10_Calibrations: Repeated calibration of the AFM against the z-interferometer of the NMM-1.
20_Standstill-Measurements: Three standstill measurements for 90 s each.
30_Long-Term-Precision: Standstill measurements for 15 s every 10 min for in sum 18 hours.
40_Scans: Repeated closed-loop scans on a calibration grating.
50_SINCOS: Repeated movement of the stage in z-direction for 2 µm with the cantilever being in free air just before the sample.
Acknowledgement
This project was funded by the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) –TRR 285 -Project-ID 418701707, subproject C05